// JavaScript Document var template = false ; var title = 'ProMOS APC - Advanced Process Control Solution'; var menu = new Object(); menu["APC Introduction"] = 'apc' ; menu["Available Service"] = 'service' ; menu["Achievements"] = 'work' ; menu["NEWS"] = 'news' ; menu["About Us"] = 'about' ; menu["Contact Us"] = 'contact' ; //menu["常見問答"] = 'qa' ; var contact = new Object(); contact['address'] = 'ProMOS Headquarters, 300mm wafer fab in Hsinchu Science Park
No.19, Li-Hsin Rd. , Hsinchu Science Park, Hsinchu, Taiwan 30078, R.O.C.'; contact['phone'] = '886-3-579-8308 (APC Department)'; contact['email'] = 'promosapc@promos.com.tw'; /* Advanced Low-Cost and High-Efficient APC Platform Semiconductor, LCD, LED Integrated Process Monitor/Control System -> Complete APC solution for Semiconductor, LCD, LED Fabs External Sensor Application and Integration System -> Professional external sensor installation and integration Pump and Scrubber Monitor System -> Expert Pump and Scrubber Data Collection Process Tool's Fault Detection and Diagnosis System -> Creative Self Fault Detection System Design Run-to-Run Control System -> Intelligent Run to Run Control System Implementation Customized Program and Information System Design */ var product = new Array( 'Advanced Low-Cost and High-Efficient APC Platform', 'Complete APC solution for Semiconductor, LCD, LED Fabs', 'Professional external sensor installation and integration', 'Expert Pump and Scrubber Data Collection', 'Creative Self Fault Detection System Design', 'Intelligent Run to Run Control System Implementation', 'Customized Program and Information System Design' ); /* Acid Supply Sensor HEPA detector pH detector Plasma light intensity senor RF power sensor CMP slurry sensor DI water resistivity sensor Liquid precursor injection valve temperature detector Water flow rate sensor Defect measure tool's background light source detector 3-phase motor's voltage, current and phase lag detector */ var sensor = new Array( "Acid Supply Sensor", "HEPA detector", "pH detector", "Plasma light intensity senor", "RF power sensor", "CMP slurry sensor", "DI water resistivity sensor", "Liquid precursor injection valve temperature detector", "Water flow rate sensor", "Defect measure tool's background light source detector", "3-phase motor's voltage, current and phase lag detector" ); /* Accomplish ProMOS 8 inches Fab full-line APC system. Accomplish ProMOS 12 inches Fab full-line APC system. Build the first APC Fab in the world by monitoring full-line machine raw data one point per second. Complete Fab-wide web design of process management and reporting system. Promote APC data as an enterprise communication standard by successful tutorial programs. Innovate new-generation low cost APC hardware architecture. Complete APC integration of non-SECS protocol machine data. Complete APC integration of all types of external sensors. Develop automatic fault detection and real-time notification system. Implement Run-to-Run system of automatic metrology data feedback and feed-forward control. Build PFA laboratory magnetic field 3-degree monitor system to prevent interference. Develop tool signal's pattern recognition diagnosis software. Develop automatic tool signal SPEC generator and SPEC management system. */ var works = new Array( "Accomplish ProMOS 8 inches Fab full-line APC system.", "Accomplish ProMOS 12 inches Fab full-line APC system.", "Build the first APC Fab in the world by monitoring full-line machine raw data one point per second.", "Complete Fab-wide web design of process management and reporting system.", "Promote APC data as an enterprise communication standard by successful tutorial programs.", "Innovate new-generation low cost APC hardware architecture.", "Complete APC integration of non-SECS protocol machine data.", "Complete APC integration of all types of external sensors.", "Develop automatic fault detection and real-time notification system.", "Implement Run-to-Run system of automatic metrology data feedback and feed-forward control.", "Build PFA laboratory magnetic field 3-degree monitor system to prevent interference.", "Develop tool signal's pattern recognition diagnosis software.", "Develop automatic tool signal SPEC generator and SPEC management system." ); /* APC is the abbreviation of Advanced Process Control, usually mentioned in the same breath with AEC - Advanced Equipment Control, one of the newly developed factory automation technologies. The concept of AEC/APC was first originated in 1988. In 1998, some IC chip makers in the United States and also in Germany began to apply AEC/APC techniques to help their production in semiconductor fabs. In Taiwan, there is no any AEC/APC application until 2000. ProMOS is the first Taiwan company introducing AEC/APC into DRAM manufacturing for its 8-inch wafer fab and all the later 12-inch wafer fabs. ProMOS’s APC system was developed by its own dedicated APC team. Nowadays, AEC/APC symposiums take place every year in North America, European and also Asia. They provide good occasions for new technology sharing between industrial and academic fields. APC is a highly automatic and pro-active monitor/control system. It plays a role of knowledge management as well. With the aid of modern IT technology, APC can collect all detailed and valuable process information for in-line fault detection, feed-forward/feedback run to run control and then store it in a central database server for further applications. All manufacturing sensor signals are collected with an extremely high sampling rate of at least 1 point or more per second, night and day. Engineers can monitor and control real-time process with automatic Fault Detection and Run to Run Control systems through various human interfaces ( PC/PDA/Mobile Phone ) in anywhere besides staying inside factory. It is more effective than the traditional way of using manual data sheets transcribing by the in-line operators. Additionally, every product will have its own historical process data in the APC server before it is delivered to the customer. It helps for quality analysis, yield enhancement and even valuable information for upstream product designers. Besides, APC charts help engineering discussion and the accumulative knowledge APC database is very educative. Having an APC system is gradually essential for modern factories. */ var apcis = 'APC is the abbreviation of Advanced Process Control, usually mentioned in the same breath with AEC - Advanced Equipment Control, one of the newly developed factory automation technologies. The concept of AEC/APC was first originated in 1988. In 1998, some IC chip makers in the United States and also in Germany began to apply AEC/APC techniques to help their production in semiconductor fabs. In Taiwan, there is no any AEC/APC application until 2000. ProMOS is the first Taiwan company introducing AEC/APC into DRAM manufacturing for its 8-inch wafer fab and all the later 12-inch wafer fabs. ProMOS APC system was developed by its own dedicated APC team. Nowadays, AEC/APC symposiums take place every year in North America, European and also Asia. They provide good occasions for new technology sharing between industrial and academic fields.'; apcis += '

' ; apcis += 'APC is a highly automatic and pro-active monitor/control system. It plays a role of knowledge management as well. With the aid of modern IT technology, APC can collect all detailed and valuable process information for in-line fault detection, feed-forward/feedback run to run control and then store it in a central database server for further applications. All manufacturing sensor signals are collected with an extremely high sampling rate of at least 1 point or more per second, night and day. Engineers can monitor and control real-time process with automatic Fault Detection and Run to Run Control systems through various human interfaces ( PC/PDA/Mobile Phone ) in anywhere besides staying inside factory. It is more effective than the traditional way of using manual data sheets transcribing by the in-line operators. Additionally, every product will have its own historical process data in the APC server before it is delivered to the customer. It helps for quality analysis, yield enhancement and even valuable information for upstream product designers. Besides, APC charts help engineering discussion and the accumulative knowledge APC database is very educative. Having an APC system is gradually essential for modern factories.'; /* ProMOS APC team was organized since 2000 in Hsinchu Scientific Industrial Park. We have accomplished two 8-inch and three 12-inch fabs' APC system with over 99% tool coverage. In 2008, we stepped into LCD industry and successfully established APC system for LCD fabs. APC team has both hardware and software specialists. We have practical APC experiences of either WINDOWS based or LINUX based system, and ready to provide qualified services for you. */ var about = "ProMOS APC team was organized since 2000 in Hsinchu Scientific Industrial Park. We have accomplished two 8-inch and three 12-inch fabs' APC system with over 99% tool coverage. In 2008, we stepped into LCD industry and successfully established APC system for LCD fabs. APC team has both hardware and software specialists. We have practical APC experiences of either WINDOWS based or LINUX based system, and ready to provide qualified services for you."; /* Real-time optimized process control Lower process variation Product quality stabilization Mis-operation prevention Economic human resource cost */ var feature_r2r = new Array( 'Real-time Process Optimization', 'Process Variation Deduction', 'Product Quality Stabilization', 'Mis-operation Prevention', 'Human Resource Cost Reduction' ) var feature_fds = new Array( 'Real-time Machine/Process Monitor', 'Product Quality Improvement', 'Excursion/Scrap Prevention', 'Accumulative Knowledge Education', 'Competitiveness Improvement' ) $(document).ready(function() { set_size(); }); function set_size() { //alert($(window).width()); }